作者：Yuanhe Li;Yanqiu Li;Ke Liu;Guodong Zhou;Lihui Liu;Aijun Liu and Ziyu Ma （¹Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optics and Photonics,Beijing Institute of Technology, 5 South Zhongguancun Street, Beijing 100081, China ²Institute of Engineering Medicine, Beijing Institute of Technology, 5 South Zhongguancun Street, Beijing 100081, China ³Chinese People’s Liberation Army General Hospital, The 8th Medical Center, 17 South Heishanhu Street, Beijing 100091, China ⁴liuke@bit.edu.cn Corresponding author: liyanqiu@bit.edu.cn Find other works by these authors Y Li Y Li K Liu G Zhou L Liu A Liu Z Ma Not Accessible Your library or personal account may give you access Get PDF Email Share Share with Facebook Tweet This Post on reddit Share with LinkedIn Add to CiteULike Add to Mendeley Add to BibSonomy Get Citation Copy Citation Text Yuanhe Li, Yanqiu Li, Ke Liu, Guodong Zhou, Lihui Liu, Aijun Liu, and Ziyu Ma, Mueller matrix imaging polarimeter at the wavelength of 265 nm, Appl. Opt. 62 , 2945-2951 (2023) Export Citation BibTex Endnote (RIS) HTML Plain Text Citation alert Save article Check for updates Related Topics Table of Contents Category Instrumentation and Measurements Optics & Photonics Topics ? The topics in this list come from the Optics and Photonics Topics applied to this article. Depolarization Imaging systems Mueller matrices Polarization Stray light Wire grid polarizers About this Article History Original Manuscript: January 10, 2023 Revised Manuscript: March 3, 2023 Manuscript Accepted: March 9, 2023 Published: April 7, 2023 PDF Article Abstract Full Article Figures ( 9 ) Data Availability Tables (¹) Equations ( 17 ) References ( 31 ) Cited By ( 0 ) Back to Top Abstract Mueller matrix imaging polarimeters (MMIPs) have been developed in the wavelength region of &#x003E;400nm role=presentation> > 400 ;¹⁴;¹³ $>400\mathrm{n}\mathrm{m}$ {\gt}{400}\;{\rm nm} with great potential in many fields yet leaving;¹void of instrumentation and application in the ultraviolet (UV) region. For the first time to our knowledge, an UV-MMIP is developed for high resolution, sensitivity, and accuracy at the wavelength of 265 nm. A modified polarization state analyzer is designed and applied to suppress stray light for nice polarization images, and the errors of the measured Mueller matrices are calibrated to lower than 0.007 in pixel level. The finer performance of the UV-MMIP is demonstrated by the measurements of unstained cervical intraepithelial neoplasia (CIN) specimens. The contrasts of depolarization images obtained by the UV-MMIP are dramatically improved over those obtained by our previous VIS-MMIP at the wavelength of 650 nm. A distinct evolution of depolarization in normal cervical epithelium tissue, CIN-I, CIN-II, and CIN-III specimens can be observed by the UV-MMIP with mean depolarization promotion by up to 20 times. This evolution could provide important evidence for CIN staging but can hardly be distinguished by the VIS-MMIP. The results prove that the UV-MMIP could be an effective tool in polarimetric applications with higher sensitivity. © 2023 Optica Publishing Group Full Article | PDF Article More Like This Holistic and efficient calibration method for Mueller matrix imaging polarimeter with;¹high numerical aperture Yuanhe Li, Yanqiu Li, Guodong Zhou, Xu Yan, Tianlei Ning, Ke Liu, Lihui Liu, Aijun Liu, and Ziyu Ma Appl. Opt. 61 (33) 9937-9945 (2022) Snapshot imaging Mueller matrix polarimeter using modified Savart polariscopes Qizhi Cao, Min Jiang, Chenling Jia, Siyue Jiang, Jing Zhang, Baoli Yao, Mingwu Jin, Edward Dehoog, Lian Duan, Huahua Wang, Ting Deng, and Dongxin Fan Appl. Opt. 62 ;⁸ 2124-2129 (2023) Partial Mueller matrix polarimeter using liquid crystal modulators Monika Salamaga and Władysław A. Woźniak Appl. Opt. 62 ;⁹ 2329-2337 (2023) View More... Assessment of anisotropy of collagen structures through spatial frequencies of Mueller matrix images for cervical pre-cancer detection Mohammad Zaffar and Asima Pradhan Appl. Opt. 59 ;⁴ 1237-1248 (2020) Different orders of scattering through time-resolved Mueller matrix imaging estimates of pre-malignancy in human cervical tissues Mohammad Zaffar, Gyana Ranjan Sahoo, and Asima Pradhan Appl. Opt. 59 ;¹⁴ 4286-4295 (2020) Previous Article Next Article References You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution. Contact your librarian or system administrator or Login to access Optica Member Subscription Data availability Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request. Cited By You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution. Contact your librarian or system administrator or Login to access Optica Member Subscription Figures ;⁹ You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution. Contact your librarian or system administrator or Login to access Optica Member Subscription Tables ;¹ You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution. Contact your librarian or system administrator or Login to access Optica Member Subscription Equations ;¹⁷ You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution. Contact your librarian or system administrator or Login to access Optica Member Subscription Applied Optics Gisele Bennett, Editor-in-Chief Journal Home About Issues in Progress Current Issue All Issues Early Posting Feature Issues × Table 1. Major Specifications of VIS- and UV-MMIPs VIS-MMIP UV-MMIP Source/operating wavelength LED/650 nm LED/265 nm Magnification/NA 40&#xD7;/0.65 role=presentation style=position: relative;> 40 × / 0.65 $40\times /0.65$ $40\times /0.65$ 40&#xD7;/0.49 role=presentation style=position: relative;> 40 × / 0.49 $40\times /0.49$ $40\times /0.49$ Pixel size 3.45&#xB5;m&#x2217;3.45&#xB5;m role=presentation style=position: relative;> 3.45 µ ;¹³ ∗ 3.45 µ ;¹³ $3.45\text{µ}\mathrm{m}\ast 3.45\text{µ}\mathrm{m}$ $3.45\text{µ}\mathrm{m}\ast 3.45\text{µ}\mathrm{m}$ 13&#xB5;m&#x2217;13&#xB5;m role=presentation style=position: relative;> 13 µ ;¹³ ∗ 13 µ ;¹³ $13\text{µ}\mathrm{m}\ast 13\text{µ}\mathrm{m}$ $13\text{µ}\mathrm{m}\ast 13\text{µ}\mathrm{m}$ Optical/pixel resolution 610 nm/172.5 nm 329 nm/650 nm Error with calibration 0.0024 0.007 Close function alertconfirmed() { // Send ajax to confirm document.getElementById(\'confirmAlertButton\').disabled = \'disabled\'; $.ajax({ cache: false, type: GET, url: set_citation_alert.cfm?uri=ao-62-11-2945&confirmalert=true }).done(function( ajxretmsg ) { if (ajxretmsg == 1) { document.getElementById(\'alertConfirmArea\').innerHTML = \' Your alert has been set! \'; } else { document.getElementById(\'alertConfirmArea\').innerHTML = \'There was an error setting your alert. Please try again later. \'; } }); } × Confirm Citation Alert Please login to set citation alerts. × MathJax Help Equations displayed with MathJax . Right click equation to reveal menu options. × Field Error Ok Select as filters Select Topics Cancel Top Publishing Home Journals Conferences Preprints (Optica Open) Information for Authors Reviewers Librarians Open Access Information Open Access Statement and Policy Terms for Journal Article Reuse About About Optica Publishing Group About My Account Contact Us Send Us Feedback Optica Home Other Resources Optica Open Optica Publishing Group Bookshelf Optics ImageBank Optics & Photonics News Spotlight on Optics My Favorites Go to My Account Login to access favorites Recent Pages Mueller matrix imaging polarimeter at the wavelength of 265 nm Dual-wavelength absorption technique for dryness measurement of wet steam Ordered photonic colloidal suspensions Performance evaluation of;¹time-division multiplexed fiber Bragg grating sensor based on heter... Camera pose estimation algorithm involving weighted measurement uncertainty of feature points b... Dynamic indoor free-space optical communication enabled by beam steering and beam shaping SNR enhancement with;¹non-local means image-denoising method for;¹Φ-OTDR system Short dual-core GaAs photonic crystal fiber splitter with;¹broad bandwidth and ultrahigh extin... Bend-resistant stress-type segmented cladding large-mode-area single-mode fibers Clear History © Copyright 2023 | Optica Publishing Group. All Rights Reserved Privacy | Terms of Use × Login or Create Account Please wait... Email Password Forgot your password? Remember me on this computer Login Cancel Institutional Login (Optica Publishing Group participates in eduGAIN) China CARSI Member Access China CAoS Member Access Privacy Policy Need help? MathJax.Hub.Config({ MathML: { // fixing some spacing issues by forcing it to use the MathML spacing instead of TeX useMathMLspacing: true }, // workaround for MathZoom overflow issues. MathZoom: { styles: { #MathJax_Zoom: { overflow: auto !important } } }, CommonHTML: { mtextFontInherit: true, linebreaks: { automatic: true } }, displayAlign: center, HTML-CSS: { linebreaks: { automatic: true }, availableFonts: Gyre-Pagella, preferredFont: Gyre-Pagella, webFont: Gyre-Pagella, mtextFontInherit: true, scale: 85, noReflows: false }, SVG: { linebreaks: { automatic: true } , font: Gyre-Pagella, mtextFontInherit: true }, menuSettings: { zoom: Click, zscale: 200% }, //testing MatchWebFonts extension MatchWebFonts: { matchFor: { HTML-CSS: true, NativeMML: true, SVG: true } }, tex2jax: {inlineMath: $,$,\\(,\\), processEscapes: true}, extensions: toMathML.js, TeX: {extensions:autoload-all.js,mediawiki-texvc.js, Macros: {scalebox: { }, 1,resizebox: { }, 1,vskip: { }, 1, noalign: { }, 1}} }); // end intitial config MathJax.Hub.Register.StartupHook(End Jax, function() { var browser = MathJax.Hub.Browser; var versionNumberStart = browser.version.substring(0, browser.version.indexOf(.)); if (browser.isSafari && (versionNumberStart === 5)) { console.log(Safari 5.x detected, rerendering in CommonHTML); jax = CommonHTML; MathJax.Hub.setRenderer(jax); } }); MathJax.Hub.Register.StartupHook(MathML Jax Ready,function () { var MATHML = MathJax.InputJax.MathML, MML = MathJax.ElementJax.mml; var MAKEMML = MATHML.Parse.prototype.MakeMML; MATHML.Parse.Augment({ MakeMML: function (node) { // // Convert to MathJax internal format // var mml = MAKEMML.call(this,node); // // If it is an with text ending in;¹combining character // create an element with the original text // and an containing the combining character. // if (mml.isa(MML.mi)) { var text = mml.data.join(); if (text.length > 1) { var;³= text.charCodeAt(text.length-1); if ((c >= 0x300 &&;³< 0x360) || (c >= 0x20D0 &&;³< 0x2100)) { mml = MML.mover( MML.mi(text.substr(0,text.length-1)), MML.mo(text.charAt(text.length-1)) ); } } } return mml; } }); }); <%= selected %> <%= unselected %> btn btn-default dropdown-toggle data-toggle=dropdown href=#> <%= size %> href=#><%= size %> aria-label=<%= documentUri %> checkbox/> abstract.cfm?uri=<%= documentUri %>&origin=search target=_blank><%= title %><%= videoIcon %> <%= authors %> <%= year %> <%= access%> <%= name %> View: <%= htmlLinks %><%= pdfLinks %> <%= xinfo %> class=sri-image height=100 width=100 alt= loading=lazy onerror=this.parentNode.removeChild(this); /> <%= abstract %> <%= searchHits %> target=_blank> <%= title %> <%= authors %> <%= year %> <%= access %> <%= journalTitle %> <%= volume %> (<%= issue %>) <%=firstPage %> View: target=_blank>Image class=sri-image height=100 width=100 alt=<%=title%> thumbnail loading=lazy /> Caption: <%= figLabel %><%= caption %> …<%= hitText %>… <%= text %> <%= xinfo %> target=_blank>PDF target=_blank>HTML | display:inline display:none）

发明人：李艳秋，武佳鑫，刘克

申请日期：2022.12.09

摘要：本发明公开了可实时自标定的快速复合型偏振系统及方法，包括由2个液晶可变相位延迟器和1个偏振片组成的PSA、由1个转台和四分之一消色差波片以及1个偏振片组成的PSG、准直透镜、聚光镜、光源和探测器，所述系统的待测样品处设置了两个探测窗口，一个窗口放置待测样品，另一个窗口为空气；光源发出光束经过准直透镜 ...

作者：钟慧，李艳秋，刘克，王嘉智，李员赫，吴劲贤 （北京理工大学光电学院光电成像技术与系统教育部重点实验室）

出处：Acta Optica Sinica 2023

关键词：测量；偏振；Mueller矩阵；相位测量；折射率；定量

摘要：Mueller矩阵因可以定量地提供组织样品的完整偏振信息，已被广泛地应用于癌症的病理诊断中。现有的Mueller成像偏振检测仪器丢失了样品的绝对相位信息，而相对的相位信息不能反映待测相位的变化规律，故需要开发嵌入式偏振光波前绝对相位检测仪器。搭建了一款嵌入式相位传感的Stokes-Mueller偏振 ...

发明人：李艳秋，王文爱，陈国强，刘克

申请日期：2022.11.21

摘要：本发明公开了高对比度和高精度的相位延迟可视化方法及系统，能够提高相位延迟的测量精度以及对比度。通过对全干涉光谱分割以得到多组Jones矩阵图，并将多组Jones矩阵图转换成多个Mueller矩阵图，最后通过加和求平均的方法得到含有由噪声引起的退偏信息的Mueller矩阵。并通过极分解的方法去除由噪声 ...

作者：周远¹;，李艳秋²; （¹中国科学院电工研究所；²北京理工大学）

出处：光学学报 2008

关键词：光学光刻；衬底反射率；底层抗反膜（BARC）；高数值孔径

摘要：在高数值孔径光学光刻中,成像光入射角分布在较大范围内,传统的单底层抗反膜不足以控制抗蚀剂-衬底界面反射率(衬底反射率)。考虑照明光源形状以及掩模的影响,提出了一种新的双层底层抗反膜优化方法,依据各级衍射光光强求衬底反射率的最小权重平均值来配置膜层。针对传统掩模、衰减相移掩模以及交替相移掩模的情况,用 ...

发明人：刘克，张孝天，李艳秋

申请日期：2023.03.23

摘要：本发明公开了一种横向剪切干涉仪的剪切率标定装置及方法，该装置允许标定板在光轴垂直方向上有任意角度的倾斜，操作简单；并且在入射光为有一定已知发散或会聚角的球面波时，此装置依然适用；该方法能在有剪切方向的旋转误差时做出调整，并且减少了图像处理的步骤，提高了剪切率测量的精度和计算效率。该装置包括标定平台、 ...

作者：刘克，张孝天，钟慧，何飞，刘书豪，李艳秋 （北京理工大学光电学院光电成像技术与系统教育部重点实验室）

出处：Acta Optica Sinica 2023

关键词：光学检测；剪切干涉；衍射光栅；相位提取；波前重建；误差校准

摘要：四波前横向剪切干涉（QWLSI）是一种精度高、动态范围大、分辨率高、抗干扰能力强的瞬态波前检测技术。本文结合国内外相关研究工作，重点阐述了本课题组在分束器件设计、多方向横向剪切干涉图处理、测量误差校准等QWLSI的关键技术研究方面取得的进展。以关键技术研究为基础，本课题组开发了QWLSI的原理装置， ...

作者：李艳秋，南雁北，陈雨情，闫旭，张心怡，刘丽辉 （北京理工大学光电学院光电成像技术与系统教育部重点实验室）

出处：Acta Optica Sinica 2023

关键词：极紫外光刻；光刻机曝光系统；物镜系统；照明系统；光学设计

摘要：极紫外光刻曝光光学系统是极紫外光刻机的核心部件，其设计直接影响极紫外光刻机的性能。极紫外光刻机曝光系统的设计难度大、研究周期长，国外极紫外光刻机产品已经用于高端芯片的制造，但国外对中国禁运相关产品。国内极紫外光刻机曝光系统的设计和研发始于2002年。国内相关领域的研究主要聚焦在极紫外光刻机曝光光学系 ...

发明人：岳力挽，刘克，李艳秋，夏力

申请日期：2023.06.14

摘要：本申请适用于光刻胶领域，具体公开一种光致产酸剂及其制备方法、以及应用该光致产酸剂的光刻胶。本申请的光致产酸剂可控制光酸的扩散距离以及光酸产生的扩散系数，从而控制光刻胶形貌的边缘粗糙度，提高光刻胶的分辨率；同时该光致产酸剂还可以避免曝光不足的问题。

作者：Liu Ke，Li Yanqiu （Key Laboratory of Photoelectronic Imaging Technology and System School of Optoelectronics Beijing Institute of Technology Beijing 100081 China）

出处：中国激光 2010

摘要：Both the absolute accuracy and repeatability of phase-shifting point diffraction interferometer (PS/PDI) are influenced by the alignment errors of int ...